The authors report about preparation and characterization of thin films of MoO3 as a material for gas-sensing applications. Structural investigation of the films is carried out by electron microscopy and X-ray diffraction techniques. The sensing behavior of the MoO3 films was tested to NO2, showing capability to detect a few ppm of NO2 with considerably short response time.
MoO3-based sputtered thin films for fast NO2 detection
FERRONI, Matteo;GUIDI, Vincenzo;MARTINELLI, Giuliano;SACERDOTI, Michele;
1998
Abstract
The authors report about preparation and characterization of thin films of MoO3 as a material for gas-sensing applications. Structural investigation of the films is carried out by electron microscopy and X-ray diffraction techniques. The sensing behavior of the MoO3 films was tested to NO2, showing capability to detect a few ppm of NO2 with considerably short response time.File in questo prodotto:
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