Magnetron sputtering (MS) technique as a new approach for medical radioisotope production has been under investigation by different research groups in the last decade. In case of Zr-89 radioisotope production it was shown that MS technique can be used for Yttrium solid target production. In previous report [1] it was demonstrated the possibility of Yttrium disks production of 60-70 µm thickness and its upgrade in terms of purity [2]. Our further research idea was to develop a process of thick targets deposition (at least 150 µm), maintaining low stress level and high adhesion. To reach such goal it was decided to decrease the distance between magnetron and sample holder from 7 to 4 cm. Essentially it must lead to deposition rate rising, but also may create issues with stress and uniformity. To perform the target production with new deposition setup it was done stress tests and deposition rate measurements. In addition, for the first time it was performed also the uniformity measurement. As a result of the work a new batch of the Yttrium solid target (Y-5) was produced and send for further irradiation at the Hospital Sacro Cuore in Negrar.
Improvement in the Yttrium Solid Target Deposition via Magnetron Sputtering for Zirconium-89 Production
A. Kotliarenko
Primo
;
2022
Abstract
Magnetron sputtering (MS) technique as a new approach for medical radioisotope production has been under investigation by different research groups in the last decade. In case of Zr-89 radioisotope production it was shown that MS technique can be used for Yttrium solid target production. In previous report [1] it was demonstrated the possibility of Yttrium disks production of 60-70 µm thickness and its upgrade in terms of purity [2]. Our further research idea was to develop a process of thick targets deposition (at least 150 µm), maintaining low stress level and high adhesion. To reach such goal it was decided to decrease the distance between magnetron and sample holder from 7 to 4 cm. Essentially it must lead to deposition rate rising, but also may create issues with stress and uniformity. To perform the target production with new deposition setup it was done stress tests and deposition rate measurements. In addition, for the first time it was performed also the uniformity measurement. As a result of the work a new batch of the Yttrium solid target (Y-5) was produced and send for further irradiation at the Hospital Sacro Cuore in Negrar.I documenti in SFERA sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
