In this paper two kind of sensors based on WO3 sputtered by magnetron sputtering and annealed at 600 degrees C have been studied. The first kind was processed by two-dimensional direct laser interfering patterning (DLIP) and the second one without any additional treatment. Morphological and structural characterization have shown a hole structure in a periodic line-pattern for the DLIP-processed sensors and a flat surface for the only-annealed sensors, both with a tetragonal WO3 phase. TOF-SIMS analysis has revealed that the first WO3 layers are reduced for both samples, which could improve sensing performance. Promising response enhancement of DLIP-processed sensors has been observed for low concentrations of NO2 (from 0.5 ppm to 5 ppm) at 200 degrees C, lowering the limit of detection (LOD) to 10 ppb, half of the LOD of the only-annealed sensors (20 ppb). Cross sensitivity to CO and HCHO have been investigated and the sensing mechanisms discussed.

WO3 processed by direct laser interference patterning for NO2 detection

Gherardi, S.
Secondo
;
Zonta, G.;Malagù, C.;Casotti, D.;Cruciani, G.;Guidi, V.;
2020

Abstract

In this paper two kind of sensors based on WO3 sputtered by magnetron sputtering and annealed at 600 degrees C have been studied. The first kind was processed by two-dimensional direct laser interfering patterning (DLIP) and the second one without any additional treatment. Morphological and structural characterization have shown a hole structure in a periodic line-pattern for the DLIP-processed sensors and a flat surface for the only-annealed sensors, both with a tetragonal WO3 phase. TOF-SIMS analysis has revealed that the first WO3 layers are reduced for both samples, which could improve sensing performance. Promising response enhancement of DLIP-processed sensors has been observed for low concentrations of NO2 (from 0.5 ppm to 5 ppm) at 200 degrees C, lowering the limit of detection (LOD) to 10 ppb, half of the LOD of the only-annealed sensors (20 ppb). Cross sensitivity to CO and HCHO have been investigated and the sensing mechanisms discussed.
Parellada-Monreal, L.; Gherardi, S.; Zonta, G.; Malagù, C.; Casotti, D.; Cruciani, G.; Guidi, V.; Martínez-Calderón, M.; Castro-Hurtado, I.; Gamarra, D.; Lozano, J.; Presmanes, L.; Mandayo, G. G.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11392/2411922
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