A process is described for forming silicon carbide coatings on nickel based superalloys by: i) nitriding the alloy or depositing a titanium nitride film on the alloy by reactive sputtering; ii) vapour phase chemica deposition of a thin film of titanium nitride; iii) annealing in a nitrogen and hydrogen atmosphere; iv) vapour phase chemical deposition of a silicon carbide layer.
Silicon Carbide Coatings
PARRETTA, Antonio
1991
Abstract
A process is described for forming silicon carbide coatings on nickel based superalloys by: i) nitriding the alloy or depositing a titanium nitride film on the alloy by reactive sputtering; ii) vapour phase chemica deposition of a thin film of titanium nitride; iii) annealing in a nitrogen and hydrogen atmosphere; iv) vapour phase chemical deposition of a silicon carbide layer.File in questo prodotto:
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