We report in our research on semiconductor-based sensing layers deposited via thick-film technique. Particular focus was devoted to achieve nanosized films through proper processing and to study their morphological and structural features. Nanosized powders were prepared by sol–gel method or laser-assisted spray pyrolysis.We also considered some techniques to maintain the stability of a nanostructure for longterm usage of the sensing layers.We detailed the preparation of screen printing pastes suitable for gas sensing application. Implementation of the sensing film on a low-power-consumption micromachined hotplate has also been addressed. The performance of such devices is presented and compared to that of conventional units.
Gas sensing through thick film technology
GUIDI, Vincenzo
Primo
;BUTTURI, Maria AngelaSecondo
;CAROTTA, Maria Cristina;CAVICCHI, Barbara;MALAGU', Cesare;MARTINELLI, Giuliano;VINCENZI, Donato;SACERDOTI, MichelePenultimo
;
2002
Abstract
We report in our research on semiconductor-based sensing layers deposited via thick-film technique. Particular focus was devoted to achieve nanosized films through proper processing and to study their morphological and structural features. Nanosized powders were prepared by sol–gel method or laser-assisted spray pyrolysis.We also considered some techniques to maintain the stability of a nanostructure for longterm usage of the sensing layers.We detailed the preparation of screen printing pastes suitable for gas sensing application. Implementation of the sensing film on a low-power-consumption micromachined hotplate has also been addressed. The performance of such devices is presented and compared to that of conventional units.File | Dimensione | Formato | |
---|---|---|---|
1-s2.0-S0925400501010772-main.pdf
solo gestori archivio
Descrizione: Full text editoriale
Tipologia:
Full text (versione editoriale)
Licenza:
NON PUBBLICO - Accesso privato/ristretto
Dimensione
262.73 kB
Formato
Adobe PDF
|
262.73 kB | Adobe PDF | Visualizza/Apri Richiedi una copia |
I documenti in SFERA sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.