A novel prototype of low-power thick-film gas sensor deposited by screen-printing onto a micromachined hotplate is presented. The micro-heater is designed to maintain a film temperature of 400 C with less than 30 mW of input power. The fabrication process involves a combination of standard, VLSI-compatible, micromachining procedures and computer-aided screen-printing. A dielectric membrane of Si N and SiO has been obtained with an embedded poly-Si resistor acting as a heating element. The 3 4 2 bonding pad and contacts have been realised by a Ti TiN Cr Au structure and the sensing film has been deposited by a screen-printing technique. Here follows a characterisation of a device, based on SnO sensing film, at working conditions 2 together with the response curve for CH and NO . We will also address some important improvements to the micro-hotplate 4 2 structure, which leads to an increased flexibility of the device.

Low-power thick-film gas sensor obtained by a combination of screen printing and micromachining techniques

VINCENZI, Donato
Primo
;
BUTTURI, Maria Angela
Secondo
;
STEFANCICH, Marco;MALAGU', Cesare;GUIDI, Vincenzo;CAROTTA, Maria Cristina;MARTINELLI, Giuliano;
2001

Abstract

A novel prototype of low-power thick-film gas sensor deposited by screen-printing onto a micromachined hotplate is presented. The micro-heater is designed to maintain a film temperature of 400 C with less than 30 mW of input power. The fabrication process involves a combination of standard, VLSI-compatible, micromachining procedures and computer-aided screen-printing. A dielectric membrane of Si N and SiO has been obtained with an embedded poly-Si resistor acting as a heating element. The 3 4 2 bonding pad and contacts have been realised by a Ti TiN Cr Au structure and the sensing film has been deposited by a screen-printing technique. Here follows a characterisation of a device, based on SnO sensing film, at working conditions 2 together with the response curve for CH and NO . We will also address some important improvements to the micro-hotplate 4 2 structure, which leads to an increased flexibility of the device.
2001
Vincenzi, Donato; Butturi, Maria Angela; Stefancich, Marco; Malagu', Cesare; Guidi, Vincenzo; Carotta, Maria Cristina; Martinelli, Giuliano; Guarnieri...espandi
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in SFERA sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11392/1204955
 Attenzione

Attenzione! I dati visualizzati non sono stati sottoposti a validazione da parte dell'ateneo

Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 19
  • ???jsp.display-item.citation.isi??? 16
social impact