Thin films were obtained by r.f. reactive sputtering from a Ti.1W.9 target onto a Si substrate followed by annealing in air at 800 °C. The thermal treatment results in a nanosized TiO2 thin film with high surface-to-volume ratio. The nanosized structure, its stability, together with the ease of preparation, make this material suitable as a gas sensor. The sensing layer proved capable to detect 20 ppm of NO2 at a temperature suitable for monitoring of exhaust gasesof engines. Its high sensitivity suggests use of this sensor for environmental purposes.

Characterization of a nanosized TiO2 gas sensor

FERRONI, Matteo;GUIDI, Vincenzo;MARTINELLI, Giuliano;
1996

Abstract

Thin films were obtained by r.f. reactive sputtering from a Ti.1W.9 target onto a Si substrate followed by annealing in air at 800 °C. The thermal treatment results in a nanosized TiO2 thin film with high surface-to-volume ratio. The nanosized structure, its stability, together with the ease of preparation, make this material suitable as a gas sensor. The sensing layer proved capable to detect 20 ppm of NO2 at a temperature suitable for monitoring of exhaust gasesof engines. Its high sensitivity suggests use of this sensor for environmental purposes.
Ferroni, Matteo; Guidi, Vincenzo; Martinelli, Giuliano; G., Faglia; P., Nelli; G., Sberveglieri
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11392/1203124
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