The kinetics of phase transition and phase segregation induced by annealing temperature on Ti-W-O gas sensing layer was studied by x-ray diffraction, Raman spectroscopy and scanning electron microscopy. The main goal was to identify, on the basis of kinetics studies, structurally stable Ti-WO3 thin film phases and compare their response to polluting gases in order to determine possible correlations between structural and electrical properties of the sensing layers.

W-Ti-O layers for gas sensing applications. Structure, morphology, and electrical properties

FERRONI, Matteo;GUIDI, Vincenzo;MARTINELLI, Giuliano
1998

Abstract

The kinetics of phase transition and phase segregation induced by annealing temperature on Ti-W-O gas sensing layer was studied by x-ray diffraction, Raman spectroscopy and scanning electron microscopy. The main goal was to identify, on the basis of kinetics studies, structurally stable Ti-WO3 thin film phases and compare their response to polluting gases in order to determine possible correlations between structural and electrical properties of the sensing layers.
L., Sangaletti; E., Bontempi; L. E., Depero; R., Salari; M., Zocchi; P., Nelli; G., Sberveglieri; P., Galinetto; Ferroni, Matteo; Guidi, Vincenzo; Martinelli, Giuliano
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11392/1203103
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