Micro-structural and electrical investigation is carried out over nanosized thin film of titanium and tungsten mixed oxides as gas-sensors. Films were prepared by r.f. reactive sputtering assisted by annealing in dry air. Electron microscopy techniques and RBS measurements revealed the structural features of these novel film while their sensing properties were tested to NO2, CO and methanol. These layers exhibit enhanced sensitivity and selectivity to NO2 with respect to previously investigated Ti-W-O films.

Nanosized thin films of tungsten-titanium mixed oxides as gas sensors

FERRONI, Matteo;GNANI, Dario;GUIDI, Vincenzo;MARTINELLI, Giuliano;
1999

Abstract

Micro-structural and electrical investigation is carried out over nanosized thin film of titanium and tungsten mixed oxides as gas-sensors. Films were prepared by r.f. reactive sputtering assisted by annealing in dry air. Electron microscopy techniques and RBS measurements revealed the structural features of these novel film while their sensing properties were tested to NO2, CO and methanol. These layers exhibit enhanced sensitivity and selectivity to NO2 with respect to previously investigated Ti-W-O films.
Ferroni, Matteo; D., Boscarino; E., Comini; Gnani, Dario; Guidi, Vincenzo; Martinelli, Giuliano; P., Nelli; V., Rigato; G., Sberveglieri
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11392/1203099
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