We report developing a SnO2 thick-film gas sensor deposited by screen printing onto a micromachined dielectric stacked membrane equipped with an embedded polysilicon microheater and two resistors for temperature measurement. The microheaters were designed to enable an operating temperature of 400 °C at about 30 mW power consumption. A newly developed scheme for temperature measurement was adopted for on-line adjustment of the film temperature through a conventional low-power feedback circuit. The electrical response of the prototypes to CO and CH4 is discussed, and their performance is compared to traditional devices fabricated via thick-film methods.

Gas-sensing device implemented on a micromachined membrane: A combination of thick-film and very large scale integrated technologies

VINCENZI, Donato
Primo
;
BUTTURI, Maria Angela
Secondo
;
GUIDI, Vincenzo;CAROTTA, Maria Cristina;MARTINELLI, Giuliano;
2000

Abstract

We report developing a SnO2 thick-film gas sensor deposited by screen printing onto a micromachined dielectric stacked membrane equipped with an embedded polysilicon microheater and two resistors for temperature measurement. The microheaters were designed to enable an operating temperature of 400 °C at about 30 mW power consumption. A newly developed scheme for temperature measurement was adopted for on-line adjustment of the film temperature through a conventional low-power feedback circuit. The electrical response of the prototypes to CO and CH4 is discussed, and their performance is compared to traditional devices fabricated via thick-film methods.
2000
Vincenzi, Donato; Butturi, Maria Angela; Guidi, Vincenzo; Carotta, Maria Cristina; Martinelli, Giuliano; V., Guarnieri; S., Brida; B., Margesin; F., G...espandi
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11392/1203096
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