We report on the syntehsis of TiNi (SMA) thin films using supersonic beams of clusters formed from a novel plasma arc gas aggregation source (PAGACS). The films are characterized by srystallites of a few tens of nanometers without any thermal annealing to recrystallize as confirmed by SEM and TEM. The films keep the stoichiometry of the original TiNi alloy used in the source. Oxygen contamination is ovbserved. The clusters in the beam are characterized by photionization and TOF mass spectrometry.
Synthesis of Nanocrystalline TiNi thin films by cluster beam deposition
CIULLO, Giuseppe;
1998
Abstract
We report on the syntehsis of TiNi (SMA) thin films using supersonic beams of clusters formed from a novel plasma arc gas aggregation source (PAGACS). The films are characterized by srystallites of a few tens of nanometers without any thermal annealing to recrystallize as confirmed by SEM and TEM. The films keep the stoichiometry of the original TiNi alloy used in the source. Oxygen contamination is ovbserved. The clusters in the beam are characterized by photionization and TOF mass spectrometry.File in questo prodotto:
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