We report in our research on semiconductor-based sensing layers deposited via thick-film technique. Particular focus was devoted to achieve nanosized films through proper processing and to study their morphological and structural features. Nanosized powders were prepared by sol–gel method or laser-assisted spray pyrolysis.We also considered some techniques to maintain the stability of a nanostructure for longterm usage of the sensing layers.We detailed the preparation of screen printing pastes suitable for gas sensing application. Implementation of the sensing film on a low-power-consumption micromachined hotplate has also been addressed. The performance of such devices is presented and compared to that of conventional units.

Gas sensing through thick film technology

GUIDI, Vincenzo
Primo
;
BUTTURI, Maria Angela
Secondo
;
CAROTTA, Maria Cristina;CAVICCHI, Barbara;MALAGU', Cesare;MARTINELLI, Giuliano;VINCENZI, Donato;SACERDOTI, Michele
Penultimo
;
2002

Abstract

We report in our research on semiconductor-based sensing layers deposited via thick-film technique. Particular focus was devoted to achieve nanosized films through proper processing and to study their morphological and structural features. Nanosized powders were prepared by sol–gel method or laser-assisted spray pyrolysis.We also considered some techniques to maintain the stability of a nanostructure for longterm usage of the sensing layers.We detailed the preparation of screen printing pastes suitable for gas sensing application. Implementation of the sensing film on a low-power-consumption micromachined hotplate has also been addressed. The performance of such devices is presented and compared to that of conventional units.
2002
Guidi, Vincenzo; Butturi, Maria Angela; Carotta, Maria Cristina; Cavicchi, Barbara; M., Ferroni; Malagu', Cesare; Martinelli, Giuliano; Vincenzi, Donato; Sacerdoti, Michele; M., Zen
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11392/1614078
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