This paper reports about the reliability and performance characterization of a CMOS-based non-volatile memory (NVM), which operating principle is based on stiction forces within a MEMS switch. Unlike any other NVM technologies operating principles, the data retention of this technology improves at higher temperatures. The switches have been proven to operate in a extremely wide temperature range from -150˚C to 300˚C, in a 4MRad/s radiation environment and withstanding acceleration forces up to 30,000g. The technology is an ideal candidate for highly reliable non-volatile memory in harsh environmental applications, like auto-motive, defense, space, down-well and geo-thermal. This NVM switch and a tunable RF-MEMS capacitor will be the first products based on this CMOS integrated MEMS platform.
Reliability and performance characterization of a mems-based non-volatile switch
ZAMBELLI, Cristian;CHIMENTON, Andrea;OLIVO, Piero
2011
Abstract
This paper reports about the reliability and performance characterization of a CMOS-based non-volatile memory (NVM), which operating principle is based on stiction forces within a MEMS switch. Unlike any other NVM technologies operating principles, the data retention of this technology improves at higher temperatures. The switches have been proven to operate in a extremely wide temperature range from -150˚C to 300˚C, in a 4MRad/s radiation environment and withstanding acceleration forces up to 30,000g. The technology is an ideal candidate for highly reliable non-volatile memory in harsh environmental applications, like auto-motive, defense, space, down-well and geo-thermal. This NVM switch and a tunable RF-MEMS capacitor will be the first products based on this CMOS integrated MEMS platform.I documenti in SFERA sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
