Thin films of W–Ti–O mixed oxides were prepared by reactive r.f. sputtering of various Ti/W targets. Depending on the Ti/W content and annealing temperature, nanosized films with different polycrystalline structure were achieved. The layers exhibit good sensing capability to NO2 with scarce influence by CO.
Preparation and characterisation of titanium-tungsten sensors
GUIDI, Vincenzo;FERRONI, Matteo;MALAGU', Cesare;MARTINELLI, Giuliano;
2000
Abstract
Thin films of W–Ti–O mixed oxides were prepared by reactive r.f. sputtering of various Ti/W targets. Depending on the Ti/W content and annealing temperature, nanosized films with different polycrystalline structure were achieved. The layers exhibit good sensing capability to NO2 with scarce influence by CO.File in questo prodotto:
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