Thin films were obtained by r.f. reactive sputtering from a Ti.1W.9 target onto a Si substrate followed by annealing in air at 800 °C. The thermal treatment results in a nanosized TiO2 thin film with high surface-to-volume ratio. The nanosized structure, its stability, together with the ease of preparation, make this material suitable as a gas sensor. The sensing layer proved capable to detect 20 ppm of NO2 at a temperature suitable for monitoring of exhaust gasesof engines. Its high sensitivity suggests use of this sensor for environmental purposes.
Characterization of a nanosized TiO2 gas sensor
FERRONI, Matteo;GUIDI, Vincenzo;MARTINELLI, Giuliano;
1996
Abstract
Thin films were obtained by r.f. reactive sputtering from a Ti.1W.9 target onto a Si substrate followed by annealing in air at 800 °C. The thermal treatment results in a nanosized TiO2 thin film with high surface-to-volume ratio. The nanosized structure, its stability, together with the ease of preparation, make this material suitable as a gas sensor. The sensing layer proved capable to detect 20 ppm of NO2 at a temperature suitable for monitoring of exhaust gasesof engines. Its high sensitivity suggests use of this sensor for environmental purposes.File in questo prodotto:
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